Cleanroom standards for chip manufacturing workshops in the semiconductor industry
Cleanroom grade standards
The grades of cleanrooms are usually divided according to the number and size of particles allowed in the air. Internationally, ISO 14644 is usually used for grade classification. According to this standard, the grades of cleanrooms are from high to low: ISO 1-9.
It should be noted that cleanroom standards can vary depending on the specific industry and application. In semiconductor chip production, cleanroom standards are usually more stringent to ensure that the quality and performance of the chips produced meet expectations.
Cleanroom levels can be divided into: Class 1 > Class 10 > Class 100 > Class 1000 > Class 10000 > Class 100000 > Class 300000.
Class 1 cleanrooms are mainly used in the microelectronics industry for manufacturing integrated circuits, and the precision requirements for integrated circuits are submicron.
Class 10 cleanrooms are mainly used in the semiconductor industry with a bandwidth of less than 2 microns.
Class 100 cleanliness is widely applicable and can meet the cleanliness needs of most industries. It can be used for aseptic manufacturing technology in the pharmaceutical industry. This cleanroom can be used for surgery for the manufacture of transplants and integrators, as well as isolation treatment of patients who are particularly sensitive to bacterial infections.
Class 1000 cleanrooms are mainly used for the production of fine optical products, and are also used for testing, assembly of aircraft gyroscopes, assembly of fine micro bearings, etc.
Class 10000 cleanrooms can be used for the assembly of hydraulic equipment or pneumatic equipment, and in some cases are also used in the food and beverage industry. In addition, Class 10000 cleanrooms are also widely used in the medical industry.
The permissible particle concentration of 0.5um in a Class 1000 clean room is less than 35200 (pc/m3), and the permissible particle concentration of 5um is less than 293 (pc/m3). 2. The permissible particle concentration of 0.5um in a Class 10,000 clean room is less than 352000 (pc/m3), and the permissible particle concentration of 5um is less than 2930 (pc/m3).
Safety considerations
The decoration of semiconductor cleanrooms must meet safety requirements. Generally speaking, there are a large number of flammable and explosive substances in semiconductor cleanrooms, so the relevant national safety regulations, such as fire prevention and explosion prevention, should be followed during decoration. In addition, environmental pollution and the health and safety of staff should also be considered to ensure that the decoration materials meet national standards and will not cause harm to human health.
Cleanroom air treatment system
Semiconductor cleanrooms require air treatment systems to ensure the cleanliness of the air in the workshop. The air treatment system is mainly composed of air filters, air supply systems, return air systems and exhaust systems. Among them, air filters are an important component that can effectively remove particulate matter and microorganisms in the air.
Floor, wall and ceiling decoration
In the decoration of semiconductor cleanrooms, the decoration of floors, walls and ceilings is very important because these areas are susceptible to pollution. The floor should be made of wear-resistant, anti-static and easy-to-clean materials, such as Epoxy self-leveling floor or PVC plastic floor; the walls and ceilings should be made of corrosion-resistant, anti-static and easy-to-clean materials, such as aluminum plates, stainless steel plates, glass curtain walls, etc.
Layout of electrical equipment such as lamps and sockets
In the decoration of semiconductor cleanrooms, the layout of lamps and sockets is also very important. In order to prevent pollutants such as dust and microorganisms from entering the workshop, these devices should be installed on the ceiling or above the wall height, and anti-static and non-powder-shedding materials should be selected.
Doors, windows, clean workbenches and other facilities
In the decoration of semiconductor cleanrooms, doors, windows, clean workbenches and other facilities also need special consideration. Doors and windows must be made of materials with good sealing performance and easy to clean, such as stainless steel doors and windows; clean workbenches should be made of materials that do not shed powder, slag particles, are corrosion-resistant and easy to clean, such as stainless steel workbenches.